Inventor
LEE EVANS
US7 patents
⚠️ This page may combine multiple inventors who share the name “LEE EVANS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS5605637AFeb 25, 1997
Adjustable dc bias control in a plasma reactor
APPLIED MATERIALS INC231 citations98
US6432259B1Aug 13, 2002
Plasma reactor cooled ceiling with an array of thermally isolated plasma heated mini-gas distribution plates
APPLIED MATERIALS INC104 citations96
US6364957B1Apr 2, 2002
Support assembly with thermal expansion compensation
APPLIED MATERIALS INC368 citations95
US6076482AJun 20, 2000
Thin film processing plasma reactor chamber with radially upward sloping ceiling for promoting radially outward diffusion
APPLIED MATERIALS INC41 citations92
US7294224B2Nov 13, 2007
Magnet assembly for plasma containment
APPLIED MATERIALS INC15 citations79