Inventor
YANG KAIMING
CN26 patents
⚠️ This page may combine multiple inventors who share the name “YANG KAIMING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV TSINGHUA
18 patentsUS10532832B2Jan 14, 2020
Magnetic levitation reaction sphere
UNIV TSINGHUA2 citations71
US9903704B2Feb 27, 2018
Three-DOF heterodyne grating interferometer displacement measurement system
UNIV TSINGHUA2 citations71
US9879979B2Jan 30, 2018
Heterodyne grating interferometer displacement measurement system
UNIV TSINGHUA4 citations71
US10597172B2Mar 24, 2020
Magnetic-fluid momentum sphere
UNIV TSINGHUA0 citations51
US9869857B2Jan 16, 2018
Optical grating phase modulator for laser interference photoetching system
UNIV TSINGHUA0 citations51
US12393127B2Aug 19, 2025
Exposure light beam phase measurement method in laser interference photolithography, and photolithography system
UNIV TSINGHUA0 citations50
US12038690B2Jul 16, 2024
Laser interference photolithography system
UNIV TSINGHUA0 citations50
US9885556B2Feb 6, 2018
Dual-frequency grating interferometer displacement measurement system
UNIV TSINGHUA1 citations50
US12169367B2Dec 17, 2024
Vertical motion protection method and device based on dual-stage motion system of photolithography machine
UNIV TSINGHUA0 citations49
US11940349B2Mar 26, 2024
Plane grating calibration system
UNIV TSINGHUA0 citations49
US9791789B2Oct 17, 2017
Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor
UNIV TSINGHUA0 citations49
US12346030B2Jul 1, 2025
Device and method for regulating and controlling incident angle of light beam in laser interference lithography
UNIV TSINGHUA0 citations48
US12189300B2Jan 7, 2025
Scanning interference lithographic system
UNIV TSINGHUA0 citations46
US11022423B2Jun 1, 2021
Method for calibrating an error of installation of an interferometer in a multi-axis laser displacement measurement system
UNIV TSINGHUA0 citations46
US9182217B2Nov 10, 2015
Method for measuring displacement of large-range moving platform
UNIV TSINGHUA0 citations41
US9904183B2Feb 27, 2018
Coarse motion and fine motion integrated reticle stage driven by planar motor
UNIV TSINGHUA0 citations39
US9310797B2Apr 12, 2016
Single degree of freedom vibration isolating device of linear motor and motion control method thereof
UNIV TSINGHUA0 citations39
US9995569B2Jun 12, 2018
Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stage
UNIV TSINGHUA0 citations38
ZHU YU
3 patentsUS8284380B2Oct 9, 2012
Dual-stage switching system for lithographic machine
ZHU YU2 citations62
US8084897B2Dec 27, 2011
Micro stage with 6 degrees of freedom
ZHU YU2 citations62
US8599361B2Dec 3, 2013
Nanometer-precision six-degree-of-freedom magnetic suspension micro-motion table and application thereof
ZHU YU1 citations52
SHANGHAI MICROELECTRONICS EQUI
3 patentsUS9752643B2Sep 5, 2017
Negative stiffness system for gravity compensation of micropositioner
SHANGHAI MICROELECTRONICS EQUI1 citations51
US9310782B2Apr 12, 2016
Method for measuring displacement of planar motor rotor
SHANGHAI MICROELECTRONICS EQUI0 citations40
US9766054B2Sep 19, 2017
Planar motor rotor displacement measuring device and its measuring method
SHANGHAI MICROELECTRONICS EQUI0 citations39