Inventor
CHANG PO-CHIN
TW35 patents
⚠️ This page may combine multiple inventors who share the name “CHANG PO-CHIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
31 patentsUS9520482B1Dec 13, 2016
Method of cutting metal gate
TAIWAN SEMICONDUCTOR MFG CO LTD3,161 citations98
US10998421B2May 4, 2021
Reducing pattern loading in the etch-back of metal gate
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations84
US10790195B2Sep 29, 2020
Elongated pattern and formation thereof
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations84
US11626506B2Apr 11, 2023
Reducing pattern loading in the etch-back of metal gate
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11469143B2Oct 11, 2022
Semiconductor device with elongated pattern
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US11094556B2Aug 17, 2021
Method of manufacturing semiconductor devices using directional process
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US10707081B2Jul 7, 2020
Fine line patterning methods
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10692760B2Jun 23, 2020
Semiconductor structure and method for manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US12575156B2Mar 10, 2026
Reducing pattern loading in the etch-back of metal gate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12408406B2Sep 2, 2025
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12261082B2Mar 25, 2025
Semiconductor devices with a nitrided capping layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12230507B2Feb 18, 2025
Method of manufacturing semiconductor devices using directional process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12094951B1Sep 17, 2024
Capping structures in semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12087558B2Sep 10, 2024
Ion beam etching apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12051620B2Jul 30, 2024
Semiconductor structure and method for manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12034059B2Jul 9, 2024
Reducing pattern loading in the etch-back of metal gate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11978672B2May 7, 2024
Semiconductor device with elongated pattern
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11881401B2Jan 23, 2024
Method of forming metal features
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11862465B2Jan 2, 2024
Fine line patterning methods
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11651972B2May 16, 2023
Method of manufacturing semiconductor devices using directional process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11652152B2May 16, 2023
Capping structures in semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11373902B2Jun 28, 2022
Semiconductor structure and method for manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11239078B2Feb 1, 2022
Fine line patterning methods
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11043381B2Jun 22, 2021
Directional patterning method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12431431B2Sep 30, 2025
Conductive structure interconnects with downward projections
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12433006B2Sep 30, 2025
Semiconductor device with conductive liners over silicide structures and method of making the semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12494423B2Dec 9, 2025
Semiconductor device including stacked via contact and method for manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12432977B2Sep 30, 2025
Semiconductor device and method for manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12457790B2Oct 28, 2025
Semiconductor device including conductive nitride feature and method of making the semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US12327788B2Jun 10, 2025
Gate to source drain interconnects
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US12527065B2Jan 13, 2026
Semiconductor device and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50