Inventor
HAFNER BERNHARD
DE3 patents
Patents
3 patentsUS5111240AMay 5, 1992
Method for forming a photoresist pattern and apparatus applicable therewith
IBM30 citations90
US4935334AJun 19, 1990
Method for forming a photoresist pattern and apparatus applicable therewith
IBM39 citations90
US4489146ADec 18, 1984
Reverse process for making chromium masks using silicon dioxide dry etch mask
IBM13 citations71