Inventor
UDA KOJI
JP17 patents
Patents
17 patentsUS5231291AJul 27, 1993
Wafer table and exposure apparatus with the same
CANON KK149 citations98
US5577552ANov 26, 1996
Temperature controlling device for mask and wafer holders
CANON KK95 citations96
US5182615AJan 26, 1993
Exposure apparatus
CANON KK79 citations96
US5063582ANov 5, 1991
Liquid cooled x-ray lithographic exposure apparatus
CANON KK91 citations96
US5157700AOct 20, 1992
Exposure apparatus for controlling intensity of exposure radiation
CANON KK41 citations93
US5610965AMar 11, 1997
Exposure method
CANON KK29 citations92
US5377251ADec 27, 1994
Exposure apparatus
CANON KK26 citations92
US5172402ADec 15, 1992
Exposure apparatus
CANON KK33 citations92
US5138643AAug 11, 1992
Exposure apparatus
CANON KK42 citations92
US5112133AMay 12, 1992
Alignment system
CANON KK42 citations92
US5028797AJul 2, 1991
An alignment system for align first and second objects using alignment marks
CANON KK30 citations92
US4669867AJun 2, 1987
Alignment and exposure apparatus
CANON KK22 citations82
US5641264AJun 24, 1997
Substrate conveying device and method of controlling the same
CANON KK9 citations74
US5226523AJul 13, 1993
Conveying apparatus and method of controlling the same
CANON KK8 citations74
US5008703AApr 16, 1991
Exposure apparatus and control of the same
CANON KK18 citations74
US5001734AMar 19, 1991
SOR exposure system
CANON KK10 citations74
US5459573AOct 17, 1995
Light quantity controlling apparatus
CANON KK3 citations63