Inventor
GEHRES RAINER E
US2 patents
Patents
2 patentsUS7067366B2Jun 27, 2006
Method of making field effect transistors having self-aligned source and drain regions using independently controlled spacer widths
IBM7 citations64
US6967375B2Nov 22, 2005
Reduction of chemical mechanical planarization (CMP) scratches with sacrificial dielectric polish stop
IBM2 citations58