P

Inventor

OTA KAN

US8 patents
⚠️ This page may combine multiple inventors who share the name “OTA KAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AXCELIS TECH INC

3 patents
US6987272B2Jan 17, 2006

Work piece transfer system for an ion beam implanter

AXCELIS TECH INC22 citations90
US7119343B2Oct 10, 2006

Mechanical oscillator for wafer scan with spot beam

AXCELIS TECH INC10 citations68
US7924159B2Apr 12, 2011

Remote wafer presence detection with passive RFID

AXCELIS TECH INC4 citations60

PYRAMID TECHNICAL CONSULTANTS INC

2 patents
US9427599B1Aug 30, 2016

Multi-resolution detectors for measuring and controlling a charged particle pencil beam

PYRAMID TECHNICAL CONSULTANTS INC4 citations69
US10183178B2Jan 22, 2019

Method and apparatus for controlled pencil beam therapy

PYRAMID TECHNICAL CONSULTANTS INC0 citations39

OTA KAN

2 patents
US9611540B2Apr 4, 2017

Electrostatic chuck shielding mechanism

OTA KAN0 citations37
US8481969B2Jul 9, 2013

Effective algorithm for warming a twist axis for cold ion implantations

OTA KAN0 citations34

SMICK THEODORE

1 patent
US8227768B2Jul 24, 2012

Low-inertia multi-axis multi-directional mechanically scanned ion implantation system

SMICK THEODORE80 citations94