Inventor
TANDON SANJEEV
US8 patents
⚠️ This page may combine multiple inventors who share the name “TANDON SANJEEV”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS7473655B2Jan 6, 2009
Method for silicon based dielectric chemical vapor deposition
APPLIED MATERIALS INC430 citations98
US7294581B2Nov 13, 2007
Method for fabricating silicon nitride spacer structures
APPLIED MATERIALS INC535 citations97
US7416995B2Aug 26, 2008
Method for fabricating controlled stress silicon nitride films
APPLIED MATERIALS INC19 citations91
US7465669B2Dec 16, 2008
Method of fabricating a silicon nitride stack
APPLIED MATERIALS INC33 citations88
US7488690B2Feb 10, 2009
Silicon nitride film with stress control
APPLIED MATERIALS INC11 citations79
US7365029B2Apr 29, 2008
Method for silicon nitride chemical vapor deposition
APPLIED MATERIALS INC6 citations62