Inventor

HEIGL MARTIN

DE3 patents

Patents

3 patents

US11467115B2Oct 11, 2022

Fluid sensor

FRAUNHOFER GES FORSCHUNG1 citations54

US12550326B2Feb 10, 2026

Method for producing a three-dimensionally integrated semiconductor memory

FRAUNHOFER GES FORSCHUNG0 citations40

US9312397B2Apr 12, 2016

Transistor structure, method for manufacturing a transistor structure, force-measuring system

FRAUNHOFER GES FORSCHUNG0 citations37