Inventor
BALDWIN JEREMIAH
US4 patents
Patents
4 patentsUS10351953B2Jul 16, 2019
Systems and methods for flow monitoring in a precursor vapor supply system of a substrate processing system
LAM RES CORP2 citations71
US11255017B2Feb 22, 2022
Systems and methods for flow monitoring in a precursor vapor supply system of a substrate processing system
LAM RES CORP0 citations60
USD986825SMay 23, 2023
Connector backshell
LAM RES CORP2 citations58
US9970108B2May 15, 2018
Systems and methods for vapor delivery in a substrate processing system
LAM RES CORP0 citations37