Inventor

TANG CHING C

US3 patents

⚠️ This page may combine multiple inventors who share the name “TANG CHING C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

1 patent

US4960488AOct 2, 1990

Reactor chamber self-cleaning process

APPLIED MATERIALS INC529 citations98

BENZING TECHNOLOGIES INC

1 patent

US4657616AApr 14, 1987

In-situ CVD chamber cleaner

BENZING TECHNOLOGIES INC116 citations91

(unassigned)

1 patent

US5626278AMay 6, 1997

Solder delivery and array apparatus

43 citations88