Inventor
WONG JERRY Y K
US4 patents
Patents
4 patentsUS5215619AJun 1, 1993
Magnetic field-enhanced plasma etch reactor
APPLIED MATERIALS INC194 citations98
US4960488AOct 2, 1990
Reactor chamber self-cleaning process
APPLIED MATERIALS INC529 citations98
US4842683AJun 27, 1989
Magnetic field-enhanced plasma etch reactor
APPLIED MATERIALS INC410 citations98
US4613400ASep 23, 1986
In-situ photoresist capping process for plasma etching
APPLIED MATERIALS INC43 citations91