Inventor
KVAMME DAMON
US8 patents
⚠️ This page may combine multiple inventors who share the name “KVAMME DAMON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
5 patentsUS7738093B2Jun 15, 2010
Methods for detecting and classifying defects on a reticle
KLA TENCOR CORP42 citations89
US9448343B2Sep 20, 2016
Segmented mirror apparatus for imaging and method of using the same
KLA TENCOR CORP8 citations82
US9574992B1Feb 21, 2017
Single wavelength ellipsometry with improved spot size capability
KLA TENCOR CORP5 citations68
US7926959B1Apr 19, 2011
Beam conditioning to reduce spatial coherence
KLA TENCOR CORP1 citations50
US9046500B2Jun 2, 2015
Adaptable illuminating apparatus, system, and method for extreme ultra-violet light
KLA TENCOR CORP0 citations49