Inventor

AMEMIYA FUMIHIRO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “AMEMIYA FUMIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CENTRAL GLASS CO LTD

2 patents

US9488914B2Nov 8, 2016

Fluorine-containing sulfonic acid salt, fluorine-containing sulfonic acid salt resin, resist composition, and pattern forming method using same

CENTRAL GLASS CO LTD3 citations71

US9152045B2Oct 6, 2015

Fluorine-containing sulfonate, fluorine-containing sulfonate resin, resist composition and pattern formation method

CENTRAL GLASS CO LTD0 citations50

MORI KAZUNORI

1 patent

US8791293B2Jul 29, 2014

Fluorine-containing sulfonate, fluorine-containing sulfonate resin, resist composition and pattern formation method

MORI KAZUNORI6 citations81