Inventor
SAKUGAWA SUGURU
JP7 patents
Patents
7 patentsUS9662761B2May 30, 2017
Polishing apparatus
EBARA CORP4 citations72
US10792784B2Oct 6, 2020
Leak checking method, and computer-readable storage medium for performing the leak checking method
EBARA CORP2 citations71
US9370852B2Jun 21, 2016
Pressure regulator and polishing apparatus having the pressure regulator
EBARA CORP2 citations61
US11642753B2May 9, 2023
Polishing-pad laminated structure, polishing-pad positioning instrument, and method of attaching a polishing pad to a polishing table
EBARA CORP0 citations58
US9922852B2Mar 20, 2018
Pressure calibration jig and substrate processing apparatus
EBARA CORP0 citations51
US11221239B2Jan 11, 2022
Substrate processing apparatus and method of detecting indentation formed in substrate
EBARA CORP0 citations46
US10556314B2Feb 11, 2020
Head height adjustment device and substrate processing apparatus provided with head height adjustment device
EBARA CORP0 citations39