Inventor
BASI JAGTAR S
6 patents
Patents
6 patentsUS4057939ANov 15, 1977
Silicon wafer polishing
IBM61 citations94
US4050954ASep 27, 1977
Surface treatment of semiconductor substrates
IBM81 citations94
US4435247AMar 6, 1984
Method for polishing titanium carbide
IBM47 citations90
US4549374AOct 29, 1985
Method for polishing semiconductor wafers with montmorillonite slurry
IBM32 citations88
US4129457ADec 12, 1978
Post-polishing cleaning of semiconductor surfaces
IBM29 citations80
US3951710AApr 20, 1976
Method for removing copper contaminant from semiconductor surfaces
IBM13 citations71