Inventor

MIU THOMAS

US3 patents

⚠️ This page may combine multiple inventors who share the name “MIU THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

1 patent

US5869401AFeb 9, 1999

Plasma-enhanced flash process

LAM RES CORP46 citations88

APPLIED MATERIALS INC

1 patent

US7407081B2Aug 5, 2008

Methods and apparatus for transferring conductive pieces during semiconductor device fabrication

APPLIED MATERIALS INC8 citations72

KAWASAKI ROBOTICS USA INC

1 patent

US9002504B2Apr 7, 2015

Method of wafer system interlock for the protection of equipment and product in semiconductor processing bridge tool

KAWASAKI ROBOTICS USA INC1 citations45