Inventor
MIYAZAKI KEI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “MIYAZAKI KEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS6354832B1Mar 12, 2002
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD40 citations90
US6413317B1Jul 2, 2002
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD23 citations89
US6730620B2May 4, 2004
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD2 citations59
US12578650B2Mar 17, 2026
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations46