Inventor

SAKAGUCHI KIMINARI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “SAKAGUCHI KIMINARI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US6413317B1Jul 2, 2002

Substrate processing method and substrate processing apparatus

TOKYO ELECTRON LTD23 citations89

US6730620B2May 4, 2004

Substrate processing method and substrate processing apparatus

TOKYO ELECTRON LTD2 citations59

HAYASHI TOKUTAROU

1 patent

US8781787B2Jul 15, 2014

Substrate carrying mechanism, substrate carrying method and recording medium storing program including set of instructions to be executed to accomplish the substrate carrying method

HAYASHI TOKUTAROU9 citations78