Inventor
KOCH MATHIAS
US4 patents
⚠️ This page may combine multiple inventors who share the name “KOCH MATHIAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AXCELIS TECH INC
3 patentsUS6783630B2Aug 31, 2004
Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling
AXCELIS TECH INC22 citations91
US6695886B1Feb 24, 2004
Optical path improvement, focus length change compensation, and stray light reduction for temperature measurement system of RTP tool
AXCELIS TECH INC31 citations90
US7166187B2Jan 23, 2007
Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling
AXCELIS TECH INC12 citations82