Inventor
TSENG CHI-CHAN
TW3 patents
Patents
3 patentsUS7067409B2Jun 27, 2006
Plasma treatment at film layer to reduce sheet resistance and to improve via contact resistance
TAIWAN SEMICONDUCTOR MFG10 citations69
US7378744B2May 27, 2008
Plasma treatment at film layer to reduce sheet resistance and to improve via contact resistance
TAIWAN SEMICONDUCTOR MFG0 citations48
US7358612B2Apr 15, 2008
Plasma treatment at film layer to reduce sheet resistance and to improve via contact resistance
TAIWAN SEMICONDUCTOR MFG0 citations48