Inventor

KUROHORI TAKESHI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “KUROHORI TAKESHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NUFLARE TECHNOLOGY INC

2 patents

US7705327B2Apr 27, 2010

Beam shot position correction coefficient computation/updating technique for ultrafine pattern fabrication using variable shaped beam lithography

NUFLARE TECHNOLOGY INC8 citations81

US7605383B2Oct 20, 2009

Pattern writing apparatus using charged particle beam, and program-recorded readable recording medium

NUFLARE TECHNOLOGY INC2 citations57

KUROHORI TAKESHI

1 patent

US8461555B2Jun 11, 2013

Charged particle beam writing method and charged particle beam writing apparatus

KUROHORI TAKESHI4 citations50