Inventor

FRICKE WOLFGANG

DE5 patents

⚠️ This page may combine multiple inventors who share the name “FRICKE WOLFGANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VISTEC SEMICONDUCTOR SYS GMBH

3 patents

US7551296B2Jun 23, 2009

Method for determining the focal position of at least two edges of structures on a substrate

VISTEC SEMICONDUCTOR SYS GMBH5 citations59

US7584072B2Sep 1, 2009

Method for determining correction values for the measured values of positions of structures on a substrate

VISTEC SEMICONDUCTOR SYS GMBH5 citations52

US7978340B2Jul 12, 2011

System and method for determining positions of structures on a substrate

VISTEC SEMICONDUCTOR SYS GMBH1 citations49

LEICA MICROSYSTEMS

1 patent

US6920249B2Jul 19, 2005

Method and measuring instrument for determining the position of an edge of a pattern element on a substrate

LEICA MICROSYSTEMS50 citations91

FRICKE WOLFGANG

1 patent

US8115808B2Feb 14, 2012

Coordinate measuring machine and method for calibrating the coordinate measuring machine

FRICKE WOLFGANG4 citations54