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Inventor
YU NAE RY
KR
3 patents
⚠️ This page may combine multiple inventors who share the name “YU NAE RY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
2 patents
US9528949B2
Dec 27, 2016
Methods of detecting inhomogeneity of a layer and apparatus for performing the same
SAMSUNG ELECTRONICS CO LTD
1 citations
50
US9899231B2
Feb 20, 2018
Hard mask composition for spin-coating
SAMSUNG ELECTRONICS CO LTD
1 citations
48
KIM Myeong-koo
1 patent
US9874812B2
Jan 23, 2018
Methods of forming hardmask material film
KIM Myeong-koo
0 citations
34