Inventor
JUN KEE-YOUNG
KR4 patents
Patents
4 patentsUS9653400B2May 16, 2017
Semiconductor device and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD5 citations70
US11270881B2Mar 8, 2022
Plasma deposition method, plasma deposition apparatus and method of manufacturing semiconductor device
SAMSUNG ELECTRONICS CO LTD3 citations68
US9929098B2Mar 27, 2018
Copper via with barrier layer and cap layer
SAMSUNG ELECTRONICS CO LTD0 citations50
US11508557B2Nov 22, 2022
Semiconductor manufacturing apparatus having an insulating plate
SAMSUNG ELECTRONICS CO LTD0 citations47