Inventor
LEA DALLAS
US3 patents
Patents
3 patentsUS10903111B2Jan 26, 2021
Semiconductor device with linerless contacts
IBM4 citations70
US11688632B2Jun 27, 2023
Semiconductor device with linerless contacts
IBM0 citations60
US10923401B2Feb 16, 2021
Gate cut critical dimension shrink and active gate defect healing using selective deposition
IBM1 citations59