Inventor
CHEN KUAN-CHIA
TW10 patents
Patents
10 patentsUS9567668B2Feb 14, 2017
Plasma apparatus, magnetic-field controlling method, and semiconductor manufacturing method
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11018055B2May 25, 2021
Physical vapor deposition process for semiconductor interconnection structures
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US10522399B2Dec 31, 2019
Physical vapor deposition process for semiconductor interconnection structures
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US10438846B2Oct 8, 2019
Physical vapor deposition process for semiconductor interconnection structures
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US9275894B2Mar 1, 2016
Method for forming semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations62
US12354958B2Jul 8, 2025
Semiconductor devices and methods of formation
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US12575344B2Mar 10, 2026
Interconnect structures and methods and apparatuses for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US12400862B2Aug 26, 2025
Interconnect structures and methods and apparatuses for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US11694899B2Jul 4, 2023
Interconnect structures and methods and apparatuses for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US9472449B2Oct 18, 2016
Semiconductor structure with inlaid capping layer and method of manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51