Inventor
PRABHAKAR VINAY K
US18 patents
Patents
18 patentsUS12000048B2Jun 4, 2024
Pedestal for substrate processing chambers
APPLIED MATERIALS INC0 citations62
US11875969B2Jan 16, 2024
Process chamber with reduced plasma arc
APPLIED MATERIALS INC0 citations62
US11584994B2Feb 21, 2023
Pedestal for substrate processing chambers
APPLIED MATERIALS INC1 citations62
US12211728B2Jan 28, 2025
Electrostatic chuck design with improved chucking and arcing performance
APPLIED MATERIALS INC0 citations61
US11682574B2Jun 20, 2023
Electrostatic chuck design with improved chucking and arcing performance
APPLIED MATERIALS INC0 citations61
US11984305B2May 14, 2024
Substrate pedestal for improved substrate processing
APPLIED MATERIALS INC0 citations60
US11587773B2Feb 21, 2023
Substrate pedestal for improved substrate processing
APPLIED MATERIALS INC0 citations60
US11532463B2Dec 20, 2022
Semiconductor processing chamber and methods for cleaning the same
APPLIED MATERIALS INC0 citations60
US10923334B2Feb 16, 2021
Selective deposition of hardmask
APPLIED MATERIALS INC0 citations60
US11569072B2Jan 31, 2023
RF grounding configuration for pedestals
APPLIED MATERIALS INC0 citations59
US12136549B2Nov 5, 2024
Plasma-enhanced chemical vapor deposition of carbon hard-mask
APPLIED MATERIALS INC0 citations58
US12557254B2Feb 17, 2026
Two-piece RF shield design
APPLIED MATERIALS INC0 citations51
US12266550B2Apr 1, 2025
Multiple process semiconductor processing system
APPLIED MATERIALS INC0 citations50
US12191115B2Jan 7, 2025
Dual RF for controllable film deposition
APPLIED MATERIALS INC0 citations50
US11830706B2Nov 28, 2023
Heated pedestal design for improved heat transfer and temperature uniformity
APPLIED MATERIALS INC0 citations50
US11560623B2Jan 24, 2023
Methods of reducing chamber residues
APPLIED MATERIALS INC0 citations48
US12563991B2Feb 24, 2026
Thermal choke plate
APPLIED MATERIALS INC0 citations46
US12424414B2Sep 23, 2025
Semiconductor processing system with a manifold for equal splitting and common divert architecture
APPLIED MATERIALS INC0 citations43