Inventor
Kwon byung seok
US5 patents
⚠️ This page may combine multiple inventors who share the name “Kwon byung seok”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS12136549B2Nov 5, 2024
Plasma-enhanced chemical vapor deposition of carbon hard-mask
APPLIED MATERIALS INC0 citations58
US11830706B2Nov 28, 2023
Heated pedestal design for improved heat transfer and temperature uniformity
APPLIED MATERIALS INC0 citations50
US11560623B2Jan 24, 2023
Methods of reducing chamber residues
APPLIED MATERIALS INC0 citations48