Inventor
SUGANUMA TAKASHI
JP39 patents
⚠️ This page may combine multiple inventors who share the name “SUGANUMA TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GIGAPHOTON INC
19 patentsUS7923705B2Apr 12, 2011
Extreme ultra violet light source apparatus
GIGAPHOTON INC25 citations92
US7903715B2Mar 8, 2011
Slab type laser apparatus
GIGAPHOTON INC13 citations84
US9667019B2May 30, 2017
Laser apparatus and extreme ultraviolet light generation system
GIGAPHOTON INC4 citations73
US9680277B2Jun 13, 2017
Slab amplifier, and laser apparatus and extreme ultraviolet light generation apparatus including slab amplifier
GIGAPHOTON INC2 citations72
US10461494B2Oct 29, 2019
Laser apparatus and extreme ultraviolet light generation system
GIGAPHOTON INC1 citations62
US10401615B2Sep 3, 2019
Beam dump apparatus, laser apparatus equipped with the beam dump apparatus, and extreme ultraviolet light generating apparatus
GIGAPHOTON INC1 citations62
US9184551B2Nov 10, 2015
Laser apparatus and extreme ultraviolet light generation system
GIGAPHOTON INC2 citations62
US12512641B2Dec 30, 2025
Extreme ultraviolet light generation apparatus and electronic device manufacturing method
GIGAPHOTON INC0 citations52
US9362703B2Jun 7, 2016
Optical device, laser apparatus, and extreme ultraviolet light generation system
GIGAPHOTON INC0 citations52
US8804902B2Aug 12, 2014
Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus
GIGAPHOTON INC0 citations52
US8698116B2Apr 15, 2014
Extreme ultra violet light source apparatus
GIGAPHOTON INC1 citations52
US9153927B2Oct 6, 2015
Regenerative amplifier, laser apparatus, and extreme ultraviolet light generation system
GIGAPHOTON INC0 citations51
US11500194B2Nov 15, 2022
Beam delivery system, focal length selecting method, and electronic device manufacturing method
GIGAPHOTON INC0 citations50
US10842008B2Nov 17, 2020
Laser device, and extreme ultraviolet light generation system
GIGAPHOTON INC0 citations42
US10194515B2Jan 29, 2019
Beam delivery system and control method therefor
GIGAPHOTON INC0 citations42
US9954339B2Apr 24, 2018
Laser unit and extreme ultraviolet light generating system
GIGAPHOTON INC0 citations42
US9685756B2Jun 20, 2017
Laser amplifier, laser apparatus, and extreme ultraviolet light generating system
GIGAPHOTON INC0 citations42
US10374381B2Aug 6, 2019
Extreme ultraviolet light generating apparatus
GIGAPHOTON INC0 citations41
US9647406B2May 9, 2017
Laser unit and extreme ultraviolet light generating system
GIGAPHOTON INC0 citations41
KOMATSU MFG CO LTD
4 patentsUS7880153B2Feb 1, 2011
Extreme ultra violet light source apparatus
KOMATSU MFG CO LTD14 citations84
US7680158B2Mar 16, 2010
LPP type extreme ultra violet light source apparatus and driver laser for the same
KOMATSU MFG CO LTD8 citations83
US7683355B2Mar 23, 2010
Extreme ultra violet light source apparatus
KOMATSU MFG CO LTD4 citations63
US7649188B2Jan 19, 2010
LPP type extreme ultra violet light source apparatus and driver laser for the same
KOMATSU MFG CO LTD2 citations62