Inventor
KIRIKOSHI KATSUYOSHI
JP3 patents
Patents
3 patentsUS6986973B2Jan 17, 2006
Test photomask, flare evaluation method, and flare compensation method
FUJITSU LTD15 citations81
US7033904B2Apr 25, 2006
Semiconductor device, semiconductor substrate and fabrication process of a semiconductor device
FUJITSU LTD6 citations71
US7291931B2Nov 6, 2007
Semiconductor device, semiconductor substrate and fabrication process of a semiconductor device
FUJITSU LTD3 citations60