Inventor
UMEZAWA KOTA
JP11 patents
⚠️ This page may combine multiple inventors who share the name “UMEZAWA KOTA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS7964241B2Jun 21, 2011
Film formation method and apparatus for semiconductor process
TOKYO ELECTRON LTD75 citations95
US6599845B2Jul 29, 2003
Oxidizing method and oxidation system
TOKYO ELECTRON LTD31 citations92
US7674724B2Mar 9, 2010
Oxidizing method and oxidizing unit for object to be processed
TOKYO ELECTRON LTD9 citations83
US7605095B2Oct 20, 2009
Heat processing method and apparatus for semiconductor process
TOKYO ELECTRON LTD8 citations83
US7419550B2Sep 2, 2008
Oxidizing method and oxidizing unit of object for object to be processed
TOKYO ELECTRON LTD13 citations83
US7208428B2Apr 24, 2007
Method and apparatus for treating article to be treated
TOKYO ELECTRON LTD17 citations82
US7129186B2Oct 31, 2006
Oxidation method and oxidation system
TOKYO ELECTRON LTD10 citations73
US7981809B2Jul 19, 2011
Film formation method and apparatus for semiconductor process
TOKYO ELECTRON LTD4 citations62
US7452826B2Nov 18, 2008
Oxidation method and oxidation system
TOKYO ELECTRON LTD3 citations62
US9966258B2May 8, 2018
Method of growing gallium nitride-based crystal and heat treatment apparatus
TOKYO ELECTRON LTD0 citations51