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Inventor
BARAN BRUCE
US
2 patents
Patents
2 patents
US7557910B2
Jul 7, 2009
System and method for controlling a beam source in a workpiece surface inspection system
KLA TENCOR CORP
6 citations
78
US7839495B2
Nov 23, 2010
System and method for controlling a beam source in a workpiece surface inspection system
KLA TENCOR CORP
3 citations
70