Inventor
VAN DIJK REMCO MARCEL
NL4 patents
Patents
4 patentsUS7403264B2Jul 22, 2008
Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus
ASML NETHERLANDS BV24 citations90
US7626684B2Dec 1, 2009
Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus
ASML NETHERLANDS BV14 citations80
US7538875B2May 26, 2009
Lithographic apparatus and methods for use thereof
ASML NETHERLANDS BV2 citations59
US10948421B2Mar 16, 2021
Laser-driven photon source and inspection apparatus including such a laser-driven photon source
ASML NETHERLANDS BV0 citations55