Inventor

VAN KEMENADE MARC

NL4 patents

⚠️ This page may combine multiple inventors who share the name “VAN KEMENADE MARC”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BIJNEN FRANCISCUS GODEFRIDUS CASPER

2 patents

US8208121B2Jun 26, 2012

Alignment mark and a method of aligning a substrate comprising such an alignment mark

BIJNEN FRANCISCUS GODEFRIDUS CASPER24 citations89

US8908152B2Dec 9, 2014

Lithographic apparatus and device manufacturing method to determine improved absolute position of exposure fields using mark structures

BIJNEN FRANCISCUS GODEFRIDUS CASPER1 citations46

VAN KEMENADE MARC

1 patent

US8711329B2Apr 29, 2014

Lithographic apparatus and device manufacturing method

VAN KEMENADE MARC7 citations73

ASML NETHERLANDS BV

1 patent

US10948421B2Mar 16, 2021

Laser-driven photon source and inspection apparatus including such a laser-driven photon source

ASML NETHERLANDS BV0 citations55