Inventor

OPPL STEPHAN

DE2 patents

Patents

2 patents

US11326969B2May 10, 2022

Linearized micromechanical sensor

BOSCH GMBH ROBERT2 citations67

US11519803B2Dec 6, 2022

Method for manufacturing micromechanical diaphragm sensors

BOSCH GMBH ROBERT1 citations55