Inventor
PRASAD CHAITANYA A
US7 patents
Patents
7 patentsUS10626500B2Apr 21, 2020
Showerhead design
APPLIED MATERIALS INC7 citations82
US11515130B2Nov 29, 2022
Fast response pedestal assembly for selective preclean
APPLIED MATERIALS INC2 citations71
US10221483B2Mar 5, 2019
Showerhead design
APPLIED MATERIALS INC3 citations71
US11990321B2May 21, 2024
Fast response pedestal assembly for selective preclean
APPLIED MATERIALS INC0 citations60
US11615944B2Mar 28, 2023
Remote plasma oxidation chamber
APPLIED MATERIALS INC0 citations51
US11004704B2May 11, 2021
Finned rotor cover
APPLIED MATERIALS INC0 citations48
US12165907B2Dec 10, 2024
Apparatus for rotating substrates
APPLIED MATERIALS INC0 citations45