P

Inventor

YAMADA YUICHI

JP130 patents
⚠️ This page may combine multiple inventors who share the name “YAMADA YUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON KK

16 patents
US6081614AJun 27, 2000

Surface position detecting method and scanning exposure method using the same

CANON KK59 citations96
US4962423AOct 9, 1990

Mark detecting method and apparatus

CANON KK97 citations95
US6559465B1May 6, 2003

Surface position detecting method having a detection timing determination

CANON KK13 citations93
US6236447B1May 22, 2001

Exposure method and apparatus, and semiconductor device manufactured using the method

CANON KK30 citations93
US5361122ANov 1, 1994

Autofocusing device and projection exposure apparatus with the same

CANON KK35 citations93
US6426508B1Jul 30, 2002

Surface-position detection device, a projection exposure apparatus using the device, and a device manufacturing method using the apparatus

CANON KK26 citations92
US5925887AJul 20, 1999

Projection exposure apparatus including an optical characteristic detector for detecting a change in optical characteristic of a projection optical system and device manufacturing method using the same

CANON KK50 citations92
US5920398AJul 6, 1999

Surface position detecting method and scanning exposure method using the same

CANON KK43 citations92
US5793471AAug 11, 1998

Projection exposure method and apparatus in which scanning exposure is performed in accordance with a shot layout of mask patterns

CANON KK35 citations92
US5751428AMay 12, 1998

Exposure method and exposure apparatus using the same

CANON KK33 citations92
US5323016AJun 21, 1994

Focusing method

CANON KK50 citations92
US4933715AJun 12, 1990

Method of detecting position of a mark

CANON KK25 citations92
US6130751AOct 10, 2000

Positioning method and apparatus

CANON KK34 citations90
US6963075B2Nov 8, 2005

Scanning exposure apparatus and device manufacturing method

CANON KK4 citations74
US6534777B2Mar 18, 2003

Surface position detecting system and method having a sensor selection

CANON KK5 citations74
US6163369ADec 19, 2000

Plane position detecting method and exposing method and exposure apparatus using same

CANON KK15 citations74

NGK SPARK PLUG CO

12 patents

NICHIA CORP

7 patents

SUMITOMO ELECTRIC INDUSTRIES

3 patents

FUJITSU LTD

2 patents

SONY OLYMPUS MEDICAL SOLUTIONS INC

2 patents

OLYMPUS OPTICAL CO

1 patent

OLYMPUS CORP

1 patent

FANUC LTD

1 patent

OHUCHI MAKI

1 patent

KATO TOMOAKI

1 patent

TAGUCHI TOMOKO

1 patent

HITACHI VIDEO ENG

1 patent

YAMADA YUICHI

1 patent

Showing the top 50 of 130 patents by PatentIndex Score.