Inventor
YASHIMA TETSUYA
JP5 patents
Patents
5 patentsUS7445543B2Nov 4, 2008
Polishing apparatus
EBARA CORP19 citations90
US10688622B2Jun 23, 2020
Substrate processing apparatus
EBARA CORP2 citations71
US10573509B2Feb 25, 2020
Cleaning apparatus and substrate processing apparatus
EBARA CORP1 citations61
US7942725B2May 17, 2011
Polishing apparatus
EBARA CORP3 citations60
US11869788B2Jan 9, 2024
Substrate processing device
EBARA CORP0 citations50