Inventor

KUMAGAI DAI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “KUMAGAI DAI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US9716002B2Jul 25, 2017

Substrate cleaning method

TOKYO ELECTRON LTD3 citations72

US7766566B2Aug 3, 2010

Developing treatment apparatus and developing treatment method

TOKYO ELECTRON LTD4 citations61

TAKIGUCHI YASUSHI

1 patent

US8578953B2Nov 12, 2013

Substrate cleaning apparatus, substrate cleaning method, and computer-readable storage medium

TAKIGUCHI YASUSHI17 citations90