Inventor
OHYAMA KOUSUKE
JP3 patents
Patents
3 patentsUS12554197B2Feb 17, 2026
Positive resist composition and pattern forming process
SHINETSU CHEMICAL CO0 citations56
US12436462B2Oct 7, 2025
Positive resist composition and pattern forming process
SHINETSU CHEMICAL CO0 citations56
US12240804B2Mar 4, 2025
Onium salt, chemically amplified resist composition and patterning process
SHINETSU CHEMICAL CO0 citations48