Inventor
BRODSKY STEPHEN B
US5 patents
Patents
5 patentsUS5086016AFeb 4, 1992
Method of making semiconductor device contact including transition metal-compound dopant source
IBM27 citations92
US4974056ANov 27, 1990
Stacked metal silicide gate structure with barrier
IBM27 citations92
US4803110AFeb 7, 1989
Coated mask for photolithographic construction of electric circuits
IBM43 citations88
US6245668B1Jun 12, 2001
Sputtered tungsten diffusion barrier for improved interconnect robustness
IBM14 citations72
US6838364B2Jan 4, 2005
Sputtered tungsten diffusion barrier for improved interconnect robustness
IBM0 citations51