Inventor

WANI ETSUO

JP5 patents

⚠️ This page may combine multiple inventors who share the name “WANI ETSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ANELVA CORP

2 patents

US4482419ANov 13, 1984

Dry etching apparatus comprising etching chambers of different etching rate distributions

ANELVA CORP71 citations93

US5087341AFeb 11, 1992

Dry etching apparatus and method

ANELVA CORP18 citations69

RENESAS TECH CORP

1 patent

US6935351B2Aug 30, 2005

Method of cleaning CVD device and cleaning device therefor

RENESAS TECH CORP7 citations70

NAT INST OF ADVANCED IND SCIEN

1 patent

US8043438B2Oct 25, 2011

Device for cleaning CVD device and method of cleaning CVD device

NAT INST OF ADVANCED IND SCIEN4 citations61

SAKAI KATSUO

1 patent

US8277560B2Oct 2, 2012

CVD apparatus and method of cleaning the CVD apparatus

SAKAI KATSUO2 citations55