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Inventor
YASUDA KOKI
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “YASUDA KOKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ANELVA CORP
1 patent
US5087341A
Feb 11, 1992
Dry etching apparatus and method
ANELVA CORP
18 citations
69
AISAN IND
1 patent
US12135093B2
Nov 5, 2024
Valve device
AISAN IND
0 citations
44