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Inventor
EGERT WOLFGANG
DE
2 patents
⚠️ This page may combine multiple inventors who share the name “EGERT WOLFGANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
1 patent
US5798525A
Aug 25, 1998
X-ray enhanced SEM critical dimension measurement
IBM
34 citations
87
HITACHI GLOBAL STORAGE TECH
1 patent
US6844144B2
Jan 18, 2005
Single slider air bearing process using polymer brush formation
HITACHI GLOBAL STORAGE TECH
10 citations
69