Inventor
MAYAMA TAKEHIKO
JP12 patents
Patents
12 patentsUS6170622B1Jan 9, 2001
Anti-vibration apparatus and anti-vibration method thereof
CANON KK83 citations98
US6322060B1Nov 27, 2001
Anti-vibration apparatus, exposure apparatus using the same, device manufacturing method, and anti-vibration method
CANON KK81 citations96
US6021991AFeb 8, 2000
Active anti-vibration apparatus
CANON KK74 citations96
US7275627B1Oct 2, 2007
Active vibration suppression apparatus, control method therefor, and exposure apparatus having active vibration suppression apparatus
CANON KK21 citations92
US7072777B1Jul 4, 2006
Exposure apparatus anti-vibration apparatus, system identification apparatus and system identification method
CANON KK33 citations92
US7063192B2Jun 20, 2006
Active vibration suppression apparatus, control method therefor, and exposure apparatus having active vibration suppression apparatus
CANON KK24 citations92
US6155542ADec 5, 2000
Vibration damping apparatus and method
CANON KK25 citations92
US6128552AOct 3, 2000
Anti-vibration apparatus and method
CANON KK27 citations92
US5812958ASep 22, 1998
Anti-vibration system
CANON KK37 citations92
US6473159B1Oct 29, 2002
Anti-vibration system in exposure apparatus
CANON KK38 citations91
US7686144B2Mar 30, 2010
Vibration isolation device, arithmetic apparatus, exposure apparatus, and device manufacturing method
CANON KK9 citations83
US6518721B2Feb 11, 2003
Oscillation isolator
CANON KK16 citations83