Inventor
KOHLER CARSTEN ANDREAS
NL3 patents
Patents
3 patentsUS7245355B2Jul 17, 2007
Lithographic apparatus, device manufacturing method
ASML NETHERLANDS BV35 citations91
US7245353B2Jul 17, 2007
Lithographic apparatus, device manufacturing method
ASML NETHERLANDS BV38 citations91
US7374869B2May 20, 2008
Lithographic processing method and device manufactured thereby
ASML NETHERLANDS BV5 citations58