Inventor
SAKINO SHIGEO
JP10 patents
Patents
10 patentsUS5040431AAug 20, 1991
Movement guiding mechanism
CANON KK175 citations98
US5228358AJul 20, 1993
Motion guiding device
CANON KK113 citations97
US6244702B1Jun 12, 2001
Method and apparatus for producing color filter, color filter, liquid crystal display device and apparatus having the liquid crystal display device
CANON KK77 citations95
US5984470ANov 16, 1999
Apparatus for producing color filter with alignment error detection
CANON KK68 citations95
US4744675AMay 17, 1988
Moving mechanism
CANON KK72 citations95
US7443619B2Oct 28, 2008
Optical element holding apparatus, exposure apparatus and device manufacturing method
CANON KK22 citations92
US6644855B2Nov 11, 2003
Stage device, exposure apparatus, device manufacturing method and movement guidance method
CANON KK13 citations83
US7771065B2Aug 10, 2010
Optical unit and exposure apparatus having the same
CANON KK7 citations73
US7535552B2May 19, 2009
Moving/guiding apparatus and exposure apparatus using the same
CANON KK2 citations62
US7453623B2Nov 18, 2008
Reflecting mirror and exposure apparatus using the same
CANON KK2 citations62