Inventor
OSANAI EIJI
JP18 patents
Patents
18 patentsUS6028376AFeb 22, 2000
Positioning apparatus and exposure apparatus using the same
CANON KK114 citations98
US5040431AAug 20, 1991
Movement guiding mechanism
CANON KK175 citations98
US6408045B1Jun 18, 2002
Stage system and exposure apparatus with the same
CANON KK113 citations97
US5858587AJan 12, 1999
Positioning system and method and apparatus for device manufacture
CANON KK94 citations97
US5228358AJul 20, 1993
Motion guiding device
CANON KK113 citations97
US6285444B1Sep 4, 2001
Positioning system and position measuring method for use in exposure apparatus
CANON KK82 citations96
US5939852AAug 17, 1999
Stage feeding device
CANON KK60 citations96
US5909272AJun 1, 1999
Stage and exposure apparatus using same
CANON KK53 citations96
US5864389AJan 26, 1999
Stage apparatus and exposure apparatus and device producing method using the same
CANON KK56 citations96
US5610686AMar 11, 1997
Exposure apparatus including an antivibration control system
CANON KK73 citations96
US5524502AJun 11, 1996
Positioning apparatus including a hydrostatic bearing for spacing apart a supporting surface and a guide surface
CANON KK77 citations96
US5280677AJan 25, 1994
Positioning mechanism
CANON KK95 citations95
US5933215AAug 3, 1999
Exposure apparatus and device manufacturing method using the same
CANON KK50 citations92
US5717482AFeb 10, 1998
Stage apparatus and method of mounting a substrate on a substrate holding surface of a substrate chuck in which a substrate is mounted in a Z-axis direction
CANON KK44 citations92
US5701041ADec 23, 1997
Weight supporting apparatus
CANON KK40 citations92
US5376988ADec 27, 1994
Parallel-moving apparatus and lens moving device in an exposing apparatus using the same
CANON KK42 citations92
US5062020AOct 29, 1991
Recording and reproducing apparatus
CANON KK9 citations74
US4814922AMar 21, 1989
Recording and reproducing apparatus using flexible disc
CANON KK9 citations74