Inventor
FINE STEPHEN M
US6 patents
Patents
6 patentsUS5479727AJan 2, 1996
Moisture removal and passivation of surfaces
AIR PROD & CHEM54 citations94
US5464666ANov 7, 1995
Process for chemical vapor codeposition of copper and aluminum alloys
AIR PROD & CHEM63 citations94
US5332597AJul 26, 1994
Method for manufacturing inorganic membranes by organometallic chemical vapor infiltration
AIR PROD & CHEM51 citations94
US5433975AJul 18, 1995
Deposition of tungsten films from mixtures of tungsten hexafluoride organohydrosilanes and hydrogen
AIR PROD & CHEM44 citations92
US5273775ADec 28, 1993
Process for selectively depositing copper aluminum alloy onto a substrate
AIR PROD & CHEM36 citations92
US5269822ADec 14, 1993
Process for recovering oxygen from gaseous mixtures containing water or carbon dioxide which process employs barium-containing ion transport membranes
AIR PROD & CHEM26 citations91